- 부스번호 (Booth number) : BTH# 55329_27
- 제품 (Product) : Active Vibration Control System
- 카테고리 (Category) : IoT/Sensors
- 제품설명 (Product Description) : ATS shows the product for anti-vibration on semicon & display inspection equipment and superprecision equipment. Our main product is Active vibration control system which is 6 degrees of freedom anti-vibration system for micro vibration on low frequency.
